Microlithography Science and Technology
by: James R. Sheats
en | CRC
0824799534 9780824799533 9780585139333
Microlithography Science and Technology
By James R. Sheats
Publisher: CRC
Number Of Pages: 800
Publication Date: 1998-05-01
ISBN-10 / ASIN: 0824799534
ISBN-13 / EAN: 9780824799533
Product Description:
This self-contained text details both elementary and advanced aspects of submicron microlithography - providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field. Including discussions on electron beam, x-ray, and proximal probe techniques and enhanced with timesaving citations to key sources in the literature and more than 600 tables, equations, drawings, and photographs that clarify the material, the book covers mechanical systems, optics, excimer laser light sources, alignment techniques and analysis, resist chemistry, processing, multilayer lithography, plasma and reactive ion etching, metrology, and more.
Summary: A quick review
Rating: 5
A great book that gives a quick overview from contact printing and projection aligners (1970's and early 1980's technology), but it spends most of its time and effort on the more recent (2000's) technology and processes. There was information packed into each page, providing both an overview and detail into the more recent development of lithography. It helps to have some previous exposure to lithography as well as the topics of physics, optics, and chemistry since the book will build on all of these subjects to provide the basis of the newer technology.
Summary: best book for the pro
Rating: 5
this book consists almost everything u need to be a lithographer and is also concise and up-to-date!
also the price is not too high.
good book!
Summary: E-beam Lithography
Rating: 5
The book provides a great overview of the Electron Beam Lithography, which was the material of interest for me. Material is conveyed in great detail while the meaning of the material is not necessarily constricted to the experts. As an undergraduate student, I found the material readable. I was also able to understand most of the information well and as a result I believe I have a good base of knowledge about lithography. I would definitely recommend this book to other students.
Summary: Great Text Book for Microlithography
Rating: 5
The book give a very good overview of what microlithography is and it gives the recent advances in the field. I highly recommend it as something very good to have if your into the field of lithography and especially if you are a non engineer.
Summary: Very up to date information from leaders in the field.
Rating: 5
I teach a graduate class in Microlithography and this is the best text I have seen to date. It contains all the modern techniques presented in an easy to read format. I highly recommend this text for all process engineers in the field or engineers wishing to learn more about this integrated circuit processing technique.
0824799534__archive.rar 19.86 MB http://ifile.it/cfhti67|
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